HORIBA Auto SE

Auto SE is a new thin film measurement instrument that enables fully automatic analysis of thin film samples with simple controls. Sample analysis takes only seconds and provides a complete report that fully thin layers – layer thickness, optical constants, surface roughness and layer inhomogeneities. The Auto SE is a highly featured instrument that includes an automatic XYZ stage, real-time measurement location display and automatic trace size selection. Many accessories are available for a wide range of applications.

Benefits:

• spectral range: 440-1000 nm
• trace size: automatic selection 500×500 µm; 250×500 µm; 250×250 µm; 70×250 µm; 100×100 µm; 50×60 µm; 25×60 µm
• detection: CCD – resolution: 2 nm
• goniometer: fixed at 70° – adjustable to 66° and 61.5°
• accuracy: NIST 100nm d ± 4Å, n(632.8nm) ± 0.002
• repeatability: NIST 15nm ± 0.2 Å