HORIBA Smart SE

The Smart SE from HORIBA Scientific is a versatile spectroscopic ellipsometer for fast and accurate thin film measurements. It characterizes thin film thickness from a few angstroms to 20 µm, optical constants (n,k) and thin film structure properties (e.g. roughness, optically graded and anisotropic layers, etc.).
The spectral range from 450 to 1000 nm is measured in seconds, and the ellipsometric data is analyzed using the DeltaPsi2 software platform. The software integrates two levels of software to meet both routine analysis with predefined recipes and advanced analysis with state-of-the-art ellipsometric modeling.

Benefits:

• spectral range: 450 nm to 1000 nm
• spectral resolution: better than 3nm
• measurement time: <1 s to 10 s
• angle of incidence 45° to 90° in 5° increments