HORIBA UVISEL Plus

Spectroscopy Ellipsometry

The UVISEL Plus ellipsometer offers the best combination of modularity and performance for advanced characterization of thin films, surfaces and interfaces. The new UVISEL Plus incorporates the latest FastAcq acquisition technology based on dual modulation, new electronics, data processing and a high-speed monochromator and enables fast, high-resolution sample measurements in the 190 to 2100 nm range in 3 minutes.

Benefits:

high accuracy and sensitivity
modular design
large spectral range: 190-2100 nm
thin film thickness from 1Å to 50 µm

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